SPARKS, BARKLEY <br/><br/>
Micro electromechanical systems: Concepts, Design and analysis 

 - New York  Larsen & Keller  2019 
 - 253p 
<br/><br/><label>ISBN: </label>9781641721349 
<br/><br/><label>Dewey Class. No.: </label>620 SPA