| 000 | 00372nam a22001457a 4500 | ||
|---|---|---|---|
| 999 |
_c15724 _d15724 |
||
| 008 | 201215b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780819490926 | ||
| 082 | _a621.381 XIA | ||
| 100 | _aXIAO,HONG | ||
| 245 | _aIntroduction to semiconductor Manufacturing Technology | ||
| 250 | _a2nd ed. | ||
| 260 |
_aWashington _bSPIE Press _c2012 |
||
| 300 | _a664p | ||
| 942 | _cBK | ||